Researchers from The University of Osaka, National Institute for Fusion Science, National Institutes for Quantum Science and Technology, and Osaka Metropolitan University, et al. have published “Optimization of EUV output by experimentally validated radiation-hydrodynamic simulations across a broad laser parameter space”. Abstract “Practical requirements such as improving wall-plug efficiency and reducing system footprint have... » read more The post Optimizing EUV Source Efficiency With Radiation-Hydrodynamic Simulations (U. Of Osaka et al.) appeared first on Semiconductor Engineering .
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